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From The Free On-line Dictionary of Computing (05 January 2017) [foldoc]:
microelectromechanical system
MEMS
(MEMS) The integration of mechanical structures
(moving parts) with microelectronics. MEMS devices are
"custom" designed for a purpose which requires a mechanical
action to be controlled by a computer.
Applications include sensors, medical devices, process
controls.
http://mems.mcnc.org/.
See also nanotechnology.
(1999-03-25)